Plasma process.
Plasma process.

Plasma processes

Equipment

We have at our disposal a series of plants to carry out and further develop various plasma-chemical and -physical processes mainly in the low-pressure and subatmospheric pressure plasmas (0.01 to 300 mbar). If appropriate, we also work with plasma processes at atmospheric pressure. Besides commercially available plants (some of them modified), we have plants of our own design. For special specimen geometries and process requirements, we can build suitable reactors and combine them with existing plant components (process gas, flow and pressure controls, vacuum components, high-frequency generators) to make laboratory or test facility plants.