In traditional sterilization methods, microorganisms are inactivated through various physical or chemical agents such as heat, radiation or the influence of gases. The choice of the sterilization method depends on the material composition, the objective of the treatment and the range of application. With thermolabile materials such as medical products or equipment in medical en-gineering, thermal sterilization processes are not suitable. Gas sterilization procedures using explosive, toxic or carcinogenic gases are not optimal as well because they require high safety standards. Sensitive materials can be even degraded or irreversibly damaged by reactive chemical compounds during the gas sterilization process. Plasmas are successfully used in technical etch-ing and cleaning processes. The reactive particles of the plasma, thus making the use of water- or air-charged che-micals superfluous in these steps of the treatment. As a result of these mechanisms of interaction, plasmas are also suitable for sterilization methods.