Fraunhofer Institute for Interfacial Engineering and Biotechnology IGBPlasma excitation
Plasma stimulation.
- Frequency ranges:
direct current, low frequency (kHz range),
radio frequency (13.6 MHz),
microwaves (2.45 GHz) - Output: several W to 3 kW
- Continuous and pulsed excitation
Vacuum surface treatment equipment
Process gases
Process gases.
- Inert gases
- Reactive gases for surface modification (gases containing halogen, oxygen, hydrogen)
- Layer-forming agents (e.g. silane / siloxane, alkane / alkene, fluoroalkane /- alkene, amino and acrylic compounds)
- (Under)water plasmas
Plants
Plant for continuous strip treatment of web material and fibres.
- Plants for the continuous treatment of woven fabrics and fibers
- Plant with plasma diagnostics
- Parallel-plate reactors
- Reactors for the treatment of tubes
- Plants for the plasma coating of the insides of bottles, canisters or other larger hollow receptacles
- (Reactive) magnetron sputtering
- Parylen® coating plant in conjunction with plasma processes